Design of silicon ring resonators for CO₂ detection

Keyphrases

• Spectrometer 100%
• Silicon Ring Resonator 100%
• CO Detection 100%
• Resonator 50%
• CO2 Levels 50%
• Emission Spectrum 50%
• Process Technology 50%
• Air Quality 50%
• Novel Design 50%
• Quality-related 50%
• Chip-based 50%
• CO2 Emissions 50%
• Pollution Level 50%
• Silicon-based Semiconductors 50%
• Silicon Microring Resonator 50%
• Output Waveguide 50%
• Detection Device 50%
• CO2 Pollution 50%
• Resonant Wavelength 50%
• Semiconductor Process 50%
• Ring Resonator 50%
• Atmospheric CO2 Concentration 50%
• Waveguide Coupling 50%
• Photodiode Detector 50%
• Resonance Wavelength 50%
• Bus Waveguide 50%
• Silica Materials 50%
• Broadband Photodiode 50%
• Exhausters 50%

Material Science

• Resonator 100%
• Carbon Dioxide 100%
• Silicon 100%
• Waveguide 40%
• Silicon Dioxide 20%