@inproceedings{213a2b92fd43434eaef1d0cd8905ee85,
title = "Gated imaging for multi-layer wave-front sensing and surface reconstruction",
abstract = "Recently, semiconductor manufacturers have been striving for high speed, large scale multi-layer wafer surface measurement. In this paper, we propose a novel technique in multi-layer wave-front sensing. The measurement uses a gated camera in pico second shutter that can be synchronized to a pico second laser pulse, up to μm accuracy. Subsequently, we propose a compensation technique using time-of-flight wave-front sensing to reconstruct the multilayer surfaces using our proposed gated imaging technique.",
keywords = "Gated imaging, Surface reconstruction, Wavefront sensing",
author = "Tan, {Ching Seong} and Xin Wang and Lim, {Wee Keong} and Ng, {Yong Han} and Yuen, {Chai Tong}",
year = "2013",
doi = "10.1117/12.2020845",
language = "English",
isbn = "9780819495679",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013",
note = "International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 ; Conference date: 09-04-2013 Through 11-04-2013",
}