Simulation study of cutting forces, stresses and temperature during nanometric cutting of single crystal silicon

Saurav Goel, Xichun Luo, R. L. Reuben, W. B. Rashid, Jining Sun

Research output: Chapter in Book/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)

Abstract

Wear of diamond tool has always been a limiting factor in ductile regime machining of large size silicon components. In order to understand the tool wear phenomena, it is non-trivial to know the process outputs especially cutting forces, stresses and temperature during nanometric turning. In this paper, a realistic potential energy function has been deployed through molecular dynamic (MD) simulation, to simulate the process outputs of single diamond turning operation against single crystal silicon. The simulation result suggests that wear mechanism of diamond tool is fundamentally governed by these process parameters and thus critical.

Original languageEnglish
Title of host publicationPrecision Machining VI
PublisherTrans Tech Publications Ltd
Pages223-228
Number of pages6
ISBN (Print)9783037852972
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event6th International Congress of Precision Machining, ICPM2011 - Liverpool, Merseyside, United Kingdom
Duration: 13 Sept 201115 Sept 2011

Publication series

NameKey Engineering Materials
Volume496
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference6th International Congress of Precision Machining, ICPM2011
Country/TerritoryUnited Kingdom
CityLiverpool, Merseyside
Period13/09/1115/09/11

Keywords

  • MD simulations
  • Single crystal silicon
  • Single point diamond turning

ASJC Scopus subject areas

  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering

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